Robust optimization

Thickness variation can change whether a nominal design meets a specification. EUV Insight Pro brings the stack editor, optimizer and manufacturing analysis into one workflow.

Make the specification explicit

1. Build a nominal stack and inspect its spectrum.
2. Set the performance objective and relevant thickness bounds.
3. Describe the thickness-error assumptions in manufacturing analysis.
4. Evaluate the nominal design and compare candidate responses.
5. Use the robust optimization controls when optimizing under those assumptions, then recheck the result and retain the settings.

Inspect the tradeoff

Compare the target response, spectral shape and conditional pass rate. A candidate can sacrifice some nominal performance to improve its behavior under a chosen error model. That choice is meaningful only when the assumed errors represent the process you intend to study.

Read the thickness-tolerance example before interpreting a statistical result.