EUV InsightEUV optics calculators
Explore EUV filter transmission and Mo/Si multilayer reflectivity with interactive calculators and reproducible examples.
EUV Filter Transmission Calculator
Adjust zirconium and silicon thicknesses to calculate EUV transmission, reflection and absorption. Explore a Zr/Si filter at 13.5 nm.
Mo/Si Multilayer Reflectivity Calculator
Explore how bilayer count, period and absorber fraction affect a Mo/Si mirror. Calculate reflectivity and peak wavelength near 13.5 nm.