EUV InsightEUV design guides
Worked examples for EUV filters, multilayer mirrors, thickness tolerances, optical-constant imports and measured reflectivity comparisons.
Zirconium Filter Transmission at 13.5 nm
Compare calculated transmission through freestanding zirconium films at 13.5 nm, with explicit density, interface and illumination assumptions.
Mo/Si Mirror Reflectivity vs. Incidence Angle
Compare calculated peak reflectivity and wavelength for the same Mo/Si multilayer at different incidence angles measured from the surface normal.
Interface Roughness and EUV Multilayer Reflectivity
Explore the effect of interface roughness on modeled Mo/Si reflectivity, with fixed layer geometry and a clearly defined roughness approximation.
EUV Thin-Film Thickness Tolerances
Learn how to specify thickness errors, compare perturbed EUV filter designs and interpret conditional manufacturing pass rates.
Import Measured Optical Constants for EUV Thin Films
Import n, k or δ, β data into an EUV thin-film model. Follow a CSV example, check units and wavelength coverage, and preserve source details.
Compare Measured and Calculated EUV Reflectivity
Import reflectivity spectra, inspect residuals and fit bounded stack parameters. Practice with a downloadable synthetic Mo/Si example.