EUV InsightEUV filter transmission calculator
Adjust zirconium and silicon thicknesses to calculate EUV transmission, reflection and absorption. Explore a Zr/Si filter at 13.5 nm.
How thickness affects transmission
Move either slider to compare a two-layer zirconium/silicon filter. The graph shows transmission across 1–40 nm; the three readouts show transmission, reflection and absorption at 13.5 nm. You can open the same thicknesses in the app for further work.
What this example assumes
The incident beam meets Zr, then Si, then vacuum. Both sides are vacuum; there is no substrate. Densities are 6.52 g/cm³ for Zr and 2.33 g/cm³ for Si. Illumination is unpolarized at normal incidence, with smooth interfaces. Each slider covers 1–250 nm.
This optical model does not include a supporting mesh, oxide layers, defects, heating or mechanical strength. Choose additional layers and appropriate data in the workspace when your physical sample needs them.
What changes when thickness changes?
Thickness changes absorption and the phase accumulated within each film. Compare the complete spectrum as well as the target-wavelength value. The highest transmission alone does not establish that a filter is suitable for fabrication.
Can I model zirconium alone?
Yes. The single-layer zirconium example omits silicon entirely. The two-layer demo above always includes both films.
What is included for free?
The workspace supports up to three film layers and three saved designs on the free plan. Advanced optimization, comparison, exports and repeated multilayers are Pro features. Compare plans.
Calculated examples use the bundled optical reference tables, not measured samples. Zr/Si/Mo example-data fingerprint: 92954053bf1c26ab. Assumptions and data sources.